Raster scanning device to compensate for mechanical vibration disturbance during scanning process

专利摘要:
The present invention relates to a device for performing a scanning operation in a raster manner, in particular to a raster microscope. In order to more quickly and inexpensively compensate for the disturbances caused by mechanical vibrations during the scanning process, the device according to the invention detects mechanical vibrations and the output is connected to an adder together with the output of the device generating the z-signal. And a sensor for driving the filter. At this time, the output of the adder drives the device to change the distance between the sample and the sensor.
公开号:KR19990062925A
申请号:KR1019980053919
申请日:1998-12-09
公开日:1999-07-26
发明作者:페터 하일란트
申请人:페터 하일란트；
IPC主号:

专利说明:

Raster scanning device to compensate for mechanical vibration disturbance during scanning process
The present invention relates to a device for performing raster scanning, and more particularly to a raster microscope that compensates for the disturbance of mechanical vibrations during the scanning process in accordance with the preamble of claim 1.
The importance of a scanning device that scans a specimen in raster scanning is particularly recognized in the investigation of the high resolution of the specimen, which, among other things, improves displacement devices such as high-accuracy piezoelectric transducers and inputs or forces to tunnel currents. This is due to the development of sensors and sensing elements. The topography of the sample can be easily measured, or localized degradation conditions such as polymers can be found. At this time, fine resolution can be obtained up to the width of the nanometer or sub-nanometer. For this reason, the actual resolution of these devices largely depends on the external influences of the environment. At this time, mechanical vibrations such as vibration of the air or tangible vibrations due to the shaking of the building among the external influences occupy a large part. The disturbances produced in this way—for example, the disturbance of the microscope table on which the specimen is supported—can be several micrometers, corresponding to a signal-to-noise ratio of 10 ⁻³ . Thus, the high resolution of the injection device is only available when the disturbance is reduced by the device.
To this end, active or passive vibration damping or vibration isolators are used, depending on the technology involved. However, these devices have the disadvantage of being very expensive. In particular, at very low disturbance frequencies resulting from building vibrations, such devices also only allow limited protection. In addition, these devices have the disadvantage of operating very slowly because of their inherent vibration characteristics.
Accordingly, it is an object of the present invention to provide a device which can solve the disadvantages of the conventional devices.
1 shows the configuration of a device according to the invention.
In order to achieve the above object, the present invention provides a device configured according to claim 1 and a method of operating the device according to claim 11. Thus, the apparatus for performing raster scanning includes a sensor for sensing a mechanical vibration and driving a filter whose output is coupled to the adder together with the output of the apparatus for generating the adjustment signal. At this time, the output of the adder controls the device for changing the distance between the sample and the sensor, it is possible to sufficiently compensate for the interference of the mechanical vibration generated during the scanning process.
The price of the device, in particular according to the invention, which eliminates the disturbance of mechanical vibrations is very low compared to the conventional device. Because only electrical components are used, except for sensors that detect mechanical vibrations, the response to external disturbances occurs very quickly and is not limited by the inherent vibration characteristics of other machinery.
If the filter is adjustable and the output of the adder is connected to the control input of the filter, the output signal of the adder is kept constant over time by the feedback by the adaptive action of the filter, so that the influence of mechanical vibration occurring during the scanning operation This is compensated automatically. In order to isolate the disturbance to the measurement signal from the actual change in the measured value due to the formation of different measuring positions of the sample, the adaptation or equalization of the filter is performed at the point when the displacement device is not working, To finish.
To simplify the adaptation of the filter, the filter may be configured digitally. Sensors that detect mechanical vibrations can be optimized for each configuration. For example, a sensor may be formed on a microscope table on which a device for performing raster scanning is supported, and a sensor is formed near a specimen to detect mechanical vibrations. The sensor may also be formed far from the plate on which the microscope table is supported.
If desired, a sensor that senses mechanical vibration picks up displacement and / or electric acceleration. Acceleration detection makes the device react faster to disturbances.
Depending on the degree of compensation required, the vibration sensor for detecting mechanical vibrations can be extended perpendicular to the displacing horizontal direction; However, the vibration sensor can also be used to sense vibration in three axes. This makes it possible to detect disturbances that cause the specimen and sensor to displace from each other in the plane of displacement. It is also particularly relevant to disturbances generated by devices (eg displacement devices that move the sensor to the specimen).
When the three outputs of the vibration sensor with three axes are each input to a filter connected to the adder, the disturbance of the measurement signal is taken into account and compensated in three spatial directions. When all the drugs are adjusted individually and the output of the adder is connected with the control input of the filter, the signal output from the adder is kept constant and all disturbances generated by vibration by the adaptive action of each filter are compensated.
The device according to the invention can be used in any device that performs scanning in raster mode. Such a device may be used, for example, a force microscope, an electron scanning tunneling microscope, and a Gwangju scanning tunneling microscope such as a 'nuclear force' microscope and a 'van der Waals' microscope.
According to the present invention, it is possible to deform the raster scanning device or to eliminate mechanical vibration, and to combine the insulating device with the device according to the present invention.
1 shows an injection device according to the invention. The device compensates for the interference of mechanical vibrations generated during the scanning process, performs raster scanning, and detects the measurement signal S4 which is affected by the distance between the sensor and the specimen 7 supported on the microscope table 1. It includes a sensor (5).
The measurement signal S4 is applied to the electronic circuit 6 which generates the adjustment signal S5 to change the distance between each measurement area or each measurement point and sensor in the sample. The adjustment signal S5 is applied directly to the adder 4, not directly supplied to the device that changes the distance between the working sample and the sensor as in the operation of the conventional device. The device according to the invention also comprises a sensor 2 which detects mechanical vibrations and whose output signal S1 drives the input of the filter 3. At this time, the output of the filter 3 is connected to the adder 4. The adder 4 generates a new signal S6 by summing the signal S3 output from the filter and the signal S5 output from the apparatus for generating the adjustment signal S5. The equalization of the filter then produces a signal S6 that is independent of time and thereby a disturbance. In order to displace the specimen 7 and / or the sensor 5 in the raster scanning mode according to an embodiment of the present invention, a displacement device is driven to displace the specimen to track the topography.
In one embodiment of the present invention, after changing the relative position of the sensor of the plate parallel to the sample and the microscope table, a new point is detected in the sample, and by changing the relative distance between the sample and the sensor while being perpendicular to the plate The measurement signal S4 is set again. The relative change in the gap between the probe and the sensor is the absolute dimension of the difference in the heights of two adjacent measuring points in the sample.
In an embodiment of the invention, the filter 3 is configured to be adjustable so that the output of the adder 4 is connected to the control input of the filter. Accordingly, the sum signal 6 also acts as an error signal for setting the parameters of the adaptive filter 3. Since this feedback is purely electrical, the adjustment of the filter is made faster compared to the mechanical feedback device, so that the signal S6 remains constant over time when the displacement device is not operated. According to an embodiment of the invention, the filter 3 is composed of an analog filter or a digital filter.
A sensor 2 for detecting mechanical vibrations is arranged in the vicinity of the specimen. The exact location plays a subordinate role. However, the obstruction U always affects the relative position of the specimen and the sensor 5 and the signal of the sensor 2. The vibration sensor 2 may be implemented as a movement sensor and an acceleration sensor. In a particular embodiment of the present invention, the vibration sensor has a three-axis structure to sense the vibration of the horizontal displacement and the displacement perpendicular to it. The three outputs from the sensor are each connected to the input of the filter and all the outputs of the filter are connected to the adder 4. As mentioned above, by setting each filter, the signal S6 for determining the distance between the sample 7 and the sensor 5 becomes constant. Automatic compensation of disturbances caused by mechanical vibrations in three spatial directions, affecting the relative spacing between the specimen and sensor 5 and thus the measuring signal S4, is controlled by the three filters and the output of the adder In a particular embodiment of the present invention coupled to the control input of is effectively compensated. By automatically adapting the parameters of the three digital filters, the signal S5 does not change over time at each time the displacement device is not operating.
Apparatus according to an embodiment of the present invention may be a 'force' microscope, such as 'atomic force' microscope, 'van der Waals' microscope, or raster tunneling microscope, such as electron scanning tunneling microscope, optical raster tunneling microscope, etc. have. In the case of a 'nuclear force' microscope, the sensor 5 includes a sensing element in a lever arm installed in a vibrating state. Due to the horizontal displacement of the specimen and the sensor, the position of the specimen and the distance between the sensing elements change during the scan processing operation. This change in spacing has detuning of the oscillating lever arm, so that feedback is formed by a change in the vertical spacing between the sensing element and the measuring point located on the surface of the specimen.
In order to determine the topography of the specimen, the measurement signal S4 is picked up by the sensing element while the scanning operation of the specimen is kept constant and changes depending on the measurement position of the specimen and the distance between the sensing elements. After the new measuring position is formed in the sensing element, the distance between the measuring position and the sensing element is changed so that the measuring signal has a certain arbitrary value. Since any measuring signal S4 corresponds to a given distance of the sensor from the measuring position of the specimen, the device according to the invention is always controlled at a fixed distance of the sensor from each measuring position. After the new measuring position is determined, the distance between the new measuring position and the sensor changes over the path length because the new measuring position is formed higher or lower in the Z-direction by the path length than the previous measuring position. The device for generating an adjustment signal for varying the distance between the sensor 5 and the specimen 7 generates a z-signal S5 with a component that changes over time due to mechanical vibrations for this purpose. As mentioned above, this signal S5 is added to the adder 4 together with the signal S3 output from the filter 3, so as to change the distance between the sensor 5 and the sample 7. S6 is generated and this signal remains constant over time. In a preferred adaptive operation according to the invention, the filter 3 receives the input signal S1 and quantitatively generates a signal S3 with the stored sine which is equal to the change in time of the signal S5, The components are exactly canceled out. The disturbances appearing in the sensing position of the specimen surface and the distance between the sensing elements caused by the mechanical vibration are compensated by the method according to the present invention.
According to an embodiment of the present invention, the adaptation of the filter 3 can be performed at each measurement position or at arbitrary time intervals. While the scanning operation is carried out, while the displacement of the specimen with respect to the sensor 5 takes place in a plane perpendicular to the z-direction, the parameter for adjusting the filter 3 previously set is maintained.
Although the above invention has been mainly described with respect to the above-described embodiments, the invention is not necessarily limited to these embodiments. Accordingly, modifications and variations of other embodiments not described herein are not necessarily excluded from the scope of the present invention and are defined by the scope of the appended claims below.

权利要求:
Claims (14)
[1" claim-type="Currently amended] In the device for scanning in a raster mode, such as a scanning microscope, which compensates for the interference of mechanical vibration during the scanning operation,
A sensor 5 for detecting a measurement signal S4 which changes according to the distance between the sample 7 and the sensor;
A displacement device for displacing the specimen 7 and / or the sensor 5, i.e. changing the distance between the specimen 7 and the sensor 5;
A device for varying the distance between the specimen (7) and the sensor (5);
A device 6 connected to the sensor for generating an adjustment signal S5 for varying the distance between the specimen and the sensor,
In addition to the output of the device for generating the adjustment signal, the output further has a sensor (2) for driving a filter (3) connected to the adder (4), where the output of the adder (4) determines the distance between the sample (7) and the sensor. An injection device, characterized in that for driving a changing device.
[2" claim-type="Currently amended] The method of claim 1,
The displacement device displaces the specimen 7 and / or the sensor 5 horizontally, and the device changing the distance between the specimen 7 and the sensor 5 changes the interval in the vertical direction with the displacing horizontal plane. Injector characterized in that.
[3" claim-type="Currently amended] 3. Apparatus according to claim 1 or 2, characterized in that the filter is adjustable and the output of the adder (4) is connected to the control input of the filter.
[4" claim-type="Currently amended] 4. An injection device according to claim 1, 2 or 3, wherein the filter (3) is a digital filter.
[5" claim-type="Currently amended] Injector according to any one of the preceding claims, characterized in that the sensor (2) for sensing mechanical vibration is arranged adjacent to the specimen (7).
[6" claim-type="Currently amended] The scanning device according to any one of the preceding claims, wherein the sensor (2) for detecting mechanical vibrations detects displacement or acceleration of the vibrations.
[7" claim-type="Currently amended] The scanning device according to any one of the preceding claims, wherein the vibration sensor (2) detects mechanical vibrations perpendicular to the displacing plane.
[8" claim-type="Currently amended] The vibration sensor according to any one of the preceding claims, characterized in that the vibration sensor senses mechanical vibrations on three axes, and the outputs from the three axes of the sensor (2) are each connected to the output of the filter connected to the adder (4). Injection device.
[9" claim-type="Currently amended] 9. An injection device according to claim 8, wherein the filter is adjustable and the output of the adder is connected with the control input of the filter.
[10" claim-type="Currently amended] The injection device according to any one of the preceding claims, wherein the injection device is a force microscope or a tunnel microscope.
[11" claim-type="Currently amended] In the operating process of the apparatus according to any one of claims 1 to 8,
Mechanical vibration is sensed by the sensor 2, the signal of the sensor drives the filter 3, and the output signal of the filter is input to the adder 4 together with the output of the device generating the adjustment signal, An operation process of a device for scanning in a raster manner, characterized in that the output signal controls the device varying the distance between the specimen (7) and the sensor (5) so that the disturbance of mechanical vibrations occurring in the scanning operation is compensated.
[12" claim-type="Currently amended] 12. The measurement signal S4 according to claim 11, wherein the measurement signal S4 remains constant while the displacement of the specimen 7 and / or the sensor 5 occurs by varying the distance between the specimen 7 and the sensor 5. The operating process of the injection device.
[13" claim-type="Currently amended] 13. The scanning device according to claim 11 or 12, wherein the filter (3) is adjusted by the output signal of the adder (4) so that the output signal of the adder is kept constant over time in the adjusted state. Action process.
[14" claim-type="Currently amended] 14. Process according to claim 11, 12 or 13, characterized in that the adjusting operation of the filter (3) takes place when the displacement device is not operating.

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引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
1997-12-10|Priority to DE19754681.1

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1997-12-10|Priority to DE19754681A

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1998-12-09|Application filed by 페터 하일란트

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1999-07-26|Publication of KR19990062925A

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2006-06-13|Application granted

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2006-06-13|Publication of KR100567860B1

优先权:

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申请号 | 申请日 | 专利标题

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DE19754681.1|1997-12-10|

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DE19754681A|DE19754681A1|1997-12-10|1997-12-10|Device scanning in a raster mode with compensation of the interference of mechanical vibrations on the scanning process|